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Prandtl-Ishlinskii Model-based Hysteresis Compensation of a Piezoelectric Scanner for Atomic Force Microscopy
New Phys.: Sae Mulli 2017; 67: 1520~1527
Published online December 29, 2017;
© 2017 New Physics: Sae Mulli.

Bernard Ouma ALUNDA1, Melody CHEPKOECH1, Clare Chisu BYEON1, Yong Joong LEE*1, Soyeun PARK†2

1 School of Mechanical Engineering, Kyungpook National University, Daegu 41566, Korea
2 College of Pharmacy, Keimyung University, Daegu 42601, Korea
Correspondence to: *, †
Received September 13, 2017; Revised October 30, 2017; Accepted November 1, 2017.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Hysteresis is an intrinsic property associated with all piezoelectric actuators, and various techniques for overcoming this disadvantage have been investigated in the past. In this paper, we present a simple way of compensating for hysteresis in a commercial piezoelectric scanner by using the Prandtl-Ishlinskii (PI) model-based feedforward method. The adopted method uses pre-measured input-output data for a scanner with no control to obtain forward and inverse models to compensate for the hysteresis. The output from the inverse model is then used to drive the scanner. The model was validated by performing scans with and without compensation in an atomic force microscopy setup. The results confirm that the hysteresis was successfully compensated for, and the tracking errors were reduced greatly, thereby demonstrating the effectiveness of the feedforward compensation method. The proposed method has a potential to improve the imaging speed of an atomic force microscope because the scanner is not operated in a closed-loop control. Also, the extra sensor components and electronics associated with the closed-loop control can be eliminated, resulting in a simpler hardware setup.
PACS numbers: 07.79.Lh, 77.80.Dj, 77.84.-s, 42.79.Ls
Keywords: Hysteresis, Feedforward, FPGA, Atomic force microscopy, Piezo actuators

April 2018, 68 (4)
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