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Sub-Nanoliter Volume Measurement by Using a Digital Holographic Microscope
New Phys.: Sae Mulli 2018; 68: 142~146
Published online January 31, 2018;
© 2018 New Physics: Sae Mulli.

Younghun YU*

Department of Physics, Jeju National University, Jeju 63243, Korea
Correspondence to:
Received September 8, 2017; Revised October 13, 2017; Accepted October 16, 2017.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Fast sub-nanoliter volume measurement with non-contact are desirable for use in the fabrication of organic light-emitting diodes (OLEDs). We set up a digital holographic microscope (DHM), which included rotating ground glass (RGG), for measuring the liquid volume in sub-nanometer OLEDs. The DHM was based on an interferometric principle that allowed non-contact monitoring. We measured the volume of a dye liquid in the range of sub-picoliters by using the DHM. The DHM method prevents contamination and loss of media. Therefore, the proposed method is well suited for high precision and fast non-contact online monitoring of the dye liquid's volume in the microdispensing process for various applications.
PACS numbers: 42.40.Kw, 42.30.Wb, 42.30.Rx
Keywords: Digital holographic microscopy, Profilometry, Phase reconstruction

May 2018, 68 (5)
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