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The study on the sensitivity of temperature sensor with substrate
New Phys.: Sae Mulli
Published online March 2, 2018;  
© 2018 New Physics: Sae Mulli.

Taekyun Yoo, Doo jae Park, Moongyu Jang*
Received January 23, 2018; Revised February 14, 2018; Accepted March 2, 2018.
Abstract
In this study, a temperature sensor was fabricated on silicon on insulator(SOI) substrate using semiconductor and Microelectromechanical systems(MEMS) process to improve the performance of temperature sensor. For the fabrication of the silicon membrane substrate, a wet etching method using a KOH solution was used. The sensitivity and response time of temperature sensor were significantly improved in the case of fabricating on a silicon membrane as compared to the case of being manufactured on a slide glass. The thermal response characteristics were analyzed by Fick's second law modeling. It was confirmed that the reaction speed was improved about 5 times and the sensitivity was improved about 4 times compared with the slide glass substrate.


March 2018, 68 (3)
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