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Crystal properties of TiO$_2$ thin films grown at the low temperature regions by a reactive DC magnetron sputtering
New Phys.: Sae Mulli
Published online October 30, 2018;  
© 2018 New Physics: Sae Mulli.

H. Jee, J. S. Kim, H. W. Seo*
Received September 11, 2018; Revised October 29, 2018; Accepted October 29, 2018.
Abstract
We have grown anatase-TiO$_2$ thin films in the low temperature ranges from RT to 300 $^\circ$C by a reactive DC magnetron sputtering methods. In particular, we have focused on the crystalline properties of TiO$_2$ thin films dependent on the growth temperature. The increments in the crystallite size and population were found with an elevated temperature, which was revealed by X-ray diffraction and Raman spectroscopic methods. With the comparative study based on atomic force microscopic technique, we also identified the high quality of crystallites of the TiO$_2$ thin films.


December 2018, 68 (12)
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