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https://doi.org/10.3938/NPSM.68.1052
Characteristics of Copper Microspheres Grown by Using Mixed-Source Hydride Vapor-Phase Epitaxy
New Phys.: Sae Mulli 2018; 68: 1052~1058
Published online October 31, 2018;  https://doi.org/10.3938/NPSM.68.1052
© 2018 New Physics: Sae Mulli.

Kyoung Hwa KIM1, Ji-Hoon AHN1, Hyung Soo AHN*1, Min YANG1, Sam Nyung YI1, Injun JEON2, Chae Ryong CHO2, Hunsoo JEON3, Jae Hak LEE4, Hyo Suk LEE5, Suck-Whan KIM†6

1 Department of Electronic Material Engineering, Korea Maritime and Ocean University, Busan 49112, Korea
2 Department of Nanoenergy Engineering and Department of Nano Fusion Technology, Pusan National University, Busan 46241, Korea
3 Busan Techno Park, Power Semiconductor Commercialization Center, Busan 46239, Korea
4 KDMC Co., Ltd., Pyeongtaek 17717, Korea
5 L&L Co., Ltd., Suwon 16681, Korea
6 Department of Physics, Andong National University, Andong 36729, Korea
Correspondence to: *ahnhs@kmou.ac.kr, †swkim@andong.ac.kr
Received August 29, 2018; Revised September 28, 2018; Accepted October 4, 2018.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0/) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
Single-crystalline copper microspheres were grown at a high temperature of T = 1150 $^\circ$C for 2 h by using the mixed-source hydride vapor phase epitaxy (HVPE) method in a simplified reactor interlinked in series without any separation between the growth and the source zones. The single-crystalline copper microspheres in the first growth process were grown on a metallic compound graphite substrate composed of 15 wt% copper and 85 wt% carbon by using a graphite boat filled with a mixed source of Al+Ga+Mg in the source zone. The copper microspheres coated by using the mixed source in the second growth process were grown on copper microspheres that had been grown on a quartz substrate with holes at a high temperature of T = 1150 $^\circ$C for 2 h by using a graphite boat filled with a mixed source of Al+Ga+Mg in the source zone after cooling the single-crystalline copper microspheres. The copper microspheres grown were characterized by using scanning electron microscopy (SEM), energy dispersive spectrometry (EDS), and X-ray diffraction (XRD). 
PACS numbers: 81.05.Ea, 81.15.Kk
Keywords: Copper microspheres, Mixed-source HVPE, Al mixed materials, Secondary growth


October 2018, 68 (10)
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