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https://doi.org/10.3938/NPSM.68.1275
Three-Dimensional Measurements of the Specular Components by Using Direct Phase-Measuring Transmission Deflectometry
New Phys.: Sae Mulli 2018; 68: 1275~1280
Published online November 30, 2018;  https://doi.org/10.3938/NPSM.68.1275
© 2018 New Physics: Sae Mulli.

Silin NA1, Sanghoon SHIN1, Doocheol KIM2, Younghun YU*2

1 Kanghae Precision System, Hwaseong 18487, Korea
2 Department of Physics and Research Institute for Basic Sciences, Jeju National University, Jeju 63243, Korea
Correspondence to: yyhyoung@jejunu.ac.kr
Received September 11, 2018; Revised October 25, 2018; Accepted October 29, 2018.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0/) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase–height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.
PACS numbers: 42.30.Rx, 42.30.Lr, 42.40.My
Keywords: Phase-measuring deflectometry, Phase reconstruction, Surface shape measurement


November 2018, 68 (11)
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