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Use of a 3D Impedance Sensor to Monitor the Evaporation Process of Isopropyl Alcohol
New Phys.: Sae Mulli 2019; 69: 578~583
Published online May 31, 2019;
© 2019 New Physics: Sae Mulli.

Junhee PARK1, Taekyun YOO1, Jiseung LEE2, ChanHeum PARK2, Jaehyun KO3, Moongyu JANG3

1School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea
2Nano-Bio Regenerative Medical Institute. School of Medicine, Hallym University, Chuncheon 24252, Korea
3School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea/ Nano Convergence Technology Research Institute, Hallym University, Chuncheon 24252, Korea 
Correspondence to:
Received February 13, 2019; Revised March 14, 2019; Accepted April 18, 2019.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
A impedance analysis is one of the electrochemical methods used to study oxidation-reduction reactions, cell drug reactions, and so forth. In this study, we fabricated a sensor that can measure the impedance change inside a solution by measuring its impedance three dimensionally. Semiconductor and micro electro mechanical system (MEMS) processes were used to fabricate the sensor. To confirm the impedance-change characteristic of the sensor, we measured the impedance change during the volatilization of isopropyl alcohol. Electric-cell-substrate impedance sensing (ECIS) technique was used to measure the impedance. Finally, the working characteristics of the manufactured sensor were confirmed by measuring the volatilization rate of isopropyl alcohol.
PACS numbers: 07.07.Df, 84.37.+q
Keywords: Isopropyl alcohol, Sensor, ECIS, Impedance, Evaporation

May 2019, 69 (5)
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