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Nano Meter Displacement of a PZT Piezoelectric Thin Film by Using a Spectrum Analyzer
New Phys.: Sae Mulli 2019; 69: 1141~1146
Published online November 29, 2019;
© 2019 New Physics: Sae Mulli.

Bong Chan PARK1, Hae Jin SEOG1 Tae Heon KIM1, Shinuk CHO1, Ill Won KIM*1, Heonoh KIM2

1Department of Physics and Energy Harvest-Storage Research Center, University of Ulsan, Ulsan 44610, Korea
2Department of Physics, Pusan National University, Busan 46241, Korea
Correspondence to:
Received February 22, 2019; Revised October 8, 2019; Accepted October 10, 2019.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Pb(Zr,Ti)O$ _{3}$ (PZT) piezoelectric materials are widely used in sensors, ultrasonic motors, and actuators for controlling the displacement below micrometer ($\mu$m). We deposited a PZT film with a thickness of 700 nm on a Pt/TiO$ _{2}$/SiO$ _{2}$/Si substrate via the sol-gel technique. The displacement (in the nm range) of the PZT film according to the alternating voltage was accurately measured by using a Laser Doppler Vibrometer (LDV). The as-deposited PZT film on a silicon substrate was measured differently depending on the degree of clamping of the ac voltage applied to the substrate. For accurate measurement without error due to the fixing effect of this substrate, it was measured by attaching it to a rigid adhesive fixed plate. We analyzed the output signal strength of the LDV in the frequency range of interest by using with a spectrum analyzer to increase the measurement accuracy at low voltage, resulting in a piezoelectric coefficient of 45 pm/V.
PACS numbers: 77.84.-s, 11.30.Na, 47.61.-k, 42.79.Qx
Keywords: Nano displacement, Piezoelectric film, PZT, Laser Doppler vibrometer, Spectrum analyzer

November 2019, 69 (11)
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