pISSN 0374-4914
eISSN 2289-0041
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Park G, Cheon CB, Kim CH, Lee HJ.
Mechanism of Striation Formation in RF Capacitively Coupled Plasmas
. NPSM 2023;73:764-768.
https://doi.org/10.3938/NPSM.73.764
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pISSN 0374-4914