Fig. 1. FE-SEM images of AlN microspheres grown by mixed-source HVPE method : (a) 530 $\upmu$m-diameter AlN microsphere, (b) AlN microsphere surface, (c) magnified FE-SEM image of AlN microsphere surface, (d) surface protrusions of 0.7 -- 0.95 $\upmu$m, (e) surface protrusions of cubic shape, (f) cross-sectional FE-SEM image of AlN microsphere, (g) EDS line scan of AlN microsphere, and (h) EDS line scan result of AlN microspheres for the elemental C, N, O, Al, Si, Cl.
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