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Fig. 1. FE-SEM images of AlN microspheres grown by mixed-source HVPE method : (a) 530 $\upmu$m-diameter AlN microsphere, (b) AlN microsphere surface, (c) magnified FE-SEM image of AlN microsphere surface, (d) surface protrusions of 0.7 -- 0.95 $\upmu$m, (e) surface protrusions of cubic shape, (f) cross-sectional FE-SEM image of AlN microsphere, (g) EDS line scan of AlN microsphere, and (h) EDS line scan result of AlN microspheres for the elemental C, N, O, Al, Si, Cl.
New Phys.: Sae Mulli 2020;70:738~744