Deposition conditions of La0.7Ca0.3MnO3/CaMnO3/ La0.7Ca0.3MnO3 heterostructures on SrTiO3 (001) substrates.
SrTiO3/ La0.7Ca0.3MnO3/CaMnO3/ La0.7Ca0.3MnO3 (STO/LCMO/CMO/LCMO) |
||
---|---|---|
STO/LCMO10/CMO( |
STO/LCMO( |
|
Substrate temperature ( |
700 °C | 700 °C |
Energy density ( |
1.5 J/cm2 | 1.5 J/cm2 |
Oxygen Pressure ( |
0.2 – 0.3 torr | 0.2 – 0.3 torr |
Deposition time ( |
||
Note: LCMO10 is a LCMO layer which was deposited for CMO05 is a CMO layer which was depsoited for |