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Table. 1.

Deposition conditions of La0.7Ca0.3MnO3/CaMnO3/ La0.7Ca0.3MnO3 heterostructures on SrTiO3 (001) substrates.

SrTiO3/ La0.7Ca0.3MnO3/CaMnO3/ La0.7Ca0.3MnO3
(STO/LCMO/CMO/LCMO)
STO/LCMO10/CMO(t1)/LCMO10 STO/LCMO(t2)/CMO05/LCMO10
Substrate temperature (Ts) 700 °C 700 °C
Energy density (F) 1.5 J/cm2 1.5 J/cm2
Oxygen Pressure (P) 0.2 – 0.3 torr 0.2 – 0.3 torr
Deposition time (t) t1 = 10, 15, 20, 30 mins t2 = 10, 20, 30, 60 mins
Note: LCMO10 is a LCMO layer which was deposited for t = 10 mins.
CMO05 is a CMO layer which was depsoited for t = 5 mins.
New Phys.: Sae Mulli 2021;71:446~449 https://doi.org/10.3938/NPSM.71.446
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