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Fig. 3. (Color online) FE-SEM images of a single crystal hexagonal Si microneedle (a) optical microscope photo image of 7.2-mm-length Si hexagonal microneedle. (b) cross-sectional FE-SEM image of single crystal hexagonal Si microneedle. (c) plane-view image of a single crystal hexagonal Si microneedle. (d) EDS spectrum of the single crystal hexagonal Si microneedle.
New Phys.: Sae Mulli 2021;71:659~666 https://doi.org/10.3938/NPSM.71.659
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