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Fig. 4.
(Color online) XPS results of cross-sectional single crystal hexagonal Si microneedle. (a) before etching. (b) after sputtering etching.
New Phys.: Sae Mulli 2021;71:659~666
https://doi.org/10.3938/NPSM.71.659
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New Physics: Sae Mulli
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