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Fig. 3. (Color online) (a) FE-SEM images of a Si micro single crystal. (b) plane-view image of FE-SEM image of the Si micro single crystal. (c) EDS spectrum of the Si micro single crystal. (d) XRD results measured for 5 grown Si micro single crystals (The inset shows FWHM).
New Phys.: Sae Mulli 2021;71:1018~1026 https://doi.org/10.3938/NPSM.71.1018
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