Fig. 6. Capacitance-Time data measured within sensitive frequency range (center) and out of range (left), (right) about width and spacing. (a) 163 μm, (b) 211 μm, (c) 300 μm, (d) 518 μm

New Phys.: Sae Mulli 2022;72:717~724 https://doi.org/10.3938/NPSM.72.717

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