Fig. 1(Color online) X-ray diffraction profile for (a) normal scan (ω/2θ) and (b) grazing incidence scan (θin = 0.5°) of Bi-doped In₂O₃ films at various deposition temperatures. (c) Lattice constant and crystalline size obtained from (222) peak position of the films deposited at various temperatures. (d) Schematic crystal structure of Bi-doped In₂O₃ film. The vertical dotted line in (b) and 1(c) indicates the reference In₂O₃ peak positions obtained from the reference (ICSD #14388).

New Phys.: Sae Mulli 2022;72:734~741 https://doi.org/10.3938/NPSM.72.734

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