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Fig. 1(Color online) X-ray diffraction profile for (a) normal scan (ω/2θ) and (b) grazing incidence scan (θin = 0.5°) of Bi-doped In2O3 films at various deposition temperatures. (c) Lattice constant and crystalline size obtained from (222) peak position of the films deposited at various temperatures. (d) Schematic crystal structure of Bi-doped In2O3 film. The vertical dotted line in (b) and 1(c) indicates the reference In2O3 peak positions obtained from the reference (ICSD #14388).
New Phys.: Sae Mulli 2022;72:734~741