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Table. 1.

Relative atomic ratio of Bi and In from X-ray photoelectron survey spectra of Bi 4f and In 3d regions of Bi-doped In2O3 films deposited at various temperatures.

Deposition temperature
RT 100 °C 200 °C 300 °C
Bi (%) 2.5 2.6 2.6 2.7
In (%) 97.5 97.4 97.4 97.3
New Phys.: Sae Mulli 2022;72:734~741 https://doi.org/10.3938/NPSM.72.734
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