Fig. 2. (Color online) Surface morphology of Bi-doped In₂O₃ films deposited at (a) RT, (b) 100 °C, (c) 200 °C, and (d) 300 °C. The surface root-mean-square roughness (σRMS) is 2.67 nm for RT, 0.32 nm for 100 °C, 0.93 nm for 200 °C, and 0.84 nm for 300 °C, respectively.

New Phys.: Sae Mulli 2022;72:734~741 https://doi.org/10.3938/NPSM.72.734

© NPSM