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Table. 2.

Binding energy, full width at half maximum (FWHM), and peak areal ratio of the deconvoluted peaks of Bi 4f and In 3d5/2 core-level X-ray photoelectron spectra of Bi-doped In2O3 films deposited at various temperatures.

Deposition temperature Binding energy (eV) FWHM (eV) Peak arial ratio (%)
Bi 4f In 3d5/2 Bi 4f In 3d5/2 Bi 4f In 3d5/2
Bi3+ Bi2+ In3+ Bi3+ Bi3+ Bi2+ In3+ Bi3+ Bi3+ Bi2+ In3+ Bi3+
RT 159.0 157.3 444.7 442.4 1.59 1.10 1.51 0.96 91.0 9.0 98.6 1.4
100 °C 158.9 157.1 444.6 442.4 1.61 1.02 1.49 0.93 95.2 4.8 98.8 1.2
200 °C 158.9 157.1 444.6 442.4 1.58 1.05 1.47 0.97 93.6 6.4 98.6 1.4
300 °C 158.9 157.1 444.6 442.4 1.59 1.03 1.48 0.89 94.7 5.3 98.9 1.1
New Phys.: Sae Mulli 2022;72:734~741 https://doi.org/10.3938/NPSM.72.734
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