Binding energy, full width at half maximum (FWHM), and peak areal ratio of the deconvoluted peaks of O 1
| Deposition temperature | Binding energy (eV) | FWHM (eV) | Peak arial ratio (%) | ||||||
|---|---|---|---|---|---|---|---|---|---|
| C-O | VO | In-O | C-O | VO | In-O | C-O | VO | In-O | |
| RT | 532.2 | 531.2 | 530.0 | 1.91 | 1.61 | 1.22 | 14.73 | 23.39 | 61.87 |
| 100 °C | 532.1 | 531.2 | 530.0 | 1.94 | 1.65 | 1.20 | 15.97 | 19.48 | 64.55 |
| 200 °C | 532.0 | 531.1 | 530.0 | 1.90 | 1.53 | 1.17 | 11.95 | 11.44 | 76.61 |
| 300 °C | 532.1 | 531.0 | 530.0 | 1.89 | 1.58 | 1.21 | 13.57 | 12.80 | 73.63 |