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Table. 4.

Electrical resistance of Bi-doped In2O3 films deposited at various temperatures.

Deposition temperature
RT 100 °C 200 °C 300 °C
Resistance (× 1010 Ω) 8.42 7.18 6.22 0.004
New Phys.: Sae Mulli 2022;72:734~741 https://doi.org/10.3938/NPSM.72.734
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