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Table. 2.

The composition of the SrRuO3 thin films according to deposition time, measured by X-ray Photoelectron Spectroscope.

Sr [at%] Ru [at%] O [at%]
5 minutes 12.06 17.52 70.42
50 minutes 14.97 18.54 66.49
New Phys.: Sae Mulli 2022;72:754~760 https://doi.org/10.3938/NPSM.72.754
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