Resistivity and Mobility according to the deposition time, measured by Hall Effect Measurement.
| Deposition Time | 5 minutes | 50 minutes | 50 min. deposition and annealed |
|---|---|---|---|
| Resistivity | 1.99 mΩ·cm | 26.3 mΩ·cm | 3.22 mΩ·cm |
| Mobility | 8.24 cm2/Vs | 3.66 cm2/Vs | 1.75 cm2/Vs |