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Table. 4.

Figure 5 of Island size and RMS roughness of the SrRuO3 thin films according to deposition time obtained from Fig. 5.

Deposition Time 5 minutes 50 minutes
Island size 29.3 nm 53.0 nm
RMS roughness 3.76 nm 10.9 nm
New Phys.: Sae Mulli 2022;72:754~760 https://doi.org/10.3938/NPSM.72.754
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