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Fig. 1(Color online) (a) Electron backscatter diffraction (EBSD) orientation map of the polycrystalline Cu thin film shown in (a) and (b) the enlarged image of marked area in (a) by white box. (c) The boundary line map showing the misorientation angle distribution. Blue lines are for GBs and red lines for TBs. (d) {100} pole figures (PF) and (e) inverse pole figure (IPF). The EBSD measurements were carried out along the normal direction (ND). The spots in (d) and (e) representing plane normals of grains are spread over a large range of orientations.
New Phys.: Sae Mulli 2022;72:812~820