Fig. 2. (Color online) (a) X-ray diffraction results of the as-grown MoO2 thin film and the reductively annealed films. (b) 10 μm by 10 μm and (c) 2 μm by 2 μm atomic force microscopy images of the annealed Mo film, which was annealed at 1000oC. No significant changes in surface roughness are observed during the chemical reaction.
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