Fig. 1. (Color online) Scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX) analysis of LiPON/LCO stacked layers: (a) cross-sectional SEM image of LiPON/LCO stacked layers after LiPON deposition using MOCVD technique, EDX elemental mapping images of (b) phosphorus, (c) oxygen, and (d) cobalt.

New Phys.: Sae Mulli 2023;73:330~335 https://doi.org/10.3938/NPSM.73.330

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