Fig. 4. (Color online) Scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX) analysis of LiPON/LCO stacked layers: (a) cross-sectional SEM images of LiPON/LCO and LiPON/Al₂O₃/LCO stacked layer, and (b) EDX elemental mapping images of cobalt, oxygen, phosphorus, and nitrogen.

New Phys.: Sae Mulli 2023;73:330~335 https://doi.org/10.3938/NPSM.73.330

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