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Fig. 1. (Color online) Shown are the time-averaged profiles of (a) the steady-state potential and (b) the electron density evolution from the steady state at T=0 to T=500 RF periods for the GEC reference cell with a gas pressure of 400 mTorr and an RF voltage of 1200 V.
New Phys.: Sae Mulli 2023;73:764~768