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Fig. 1(Color online) FE-SEM and EDS results of Si-AlN droplets forming on the actually formed Al-based nanostructure. (a) FE-SEM image of AlN elliptical membranes, (b) enlarged image of AlN elliptical membrane. (c) Si droplets irregularly adsorbed on Al-based nanostructure. (c-1) EDS mapping of Al component. (c-2) EDS mapping of N component. (c-3) EDS mapping of Si component. (c-4) EDS mapping of Ga component. (d) Si component of “A” in (c). (e) Ga component of “B” in (c).
New Phys.: Sae Mulli 2024;74:17~24 https://doi.org/10.3938/NPSM.74.17
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