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Fig. 4. (Color online) FE-SEM images of AlN elliptical membrane and Si-AlN droplets. (a) EDS of Al-based nanostructure. (b) EDS of Si-AlN droplets. (c) EDS mapping of Si-AlN droplets. (d) EDS line scanning profile of a sample with Si-AlN droplets.
New Phys.: Sae Mulli 2024;74:17~24 https://doi.org/10.3938/NPSM.74.17
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