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Fig. 5. (Color online) FE-SEM images of AlN shell and Si-AlN core-shell. (a) Core growth inside the shell. (a-1) EDS mapping of Al component for the shell. (a-2) EDS mapping of N component for the shell. (a-3) EDS mapping of Si component for the shell. (b) Si-AlN hexa-cone core-shell. (c) Cross-section of Si-AlN core-shell. (d) EDS line scanning profile of Si-AlN core-shell.
New Phys.: Sae Mulli 2024;74:17~24 https://doi.org/10.3938/NPSM.74.17
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