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Table. 1.

Eight different simulation cases for focus ring height and material, applied voltage, and driving frequency.

Case No. Upper electrode Lower electrode Dielectric material 1 Dielectric material 2
1 Ref. Grounded V = 200 V f = 13.56 MHz SiO2 h1 = 0.78 cm SiO2 h2 = 0.78 cm
2 Grounded V = 200 V f = 13.56 MHz SiO2 h1 = 0.78 cm Al2O3 h2 = 0.78 cm
3 Grounded V = 200 V f = 13.56 MHz SiO2 h1 = 0.78 cm SiO2 h2 = 1 cm
4 V = 50 V f = 40.68 MHz V = 100 & 50 V f = 13.56 & 27.12 MHz SiO2 h1 = 0.78 cm SiO2 h2 = 0.78 cm
5 V = 50 V f = 27.12 MHz V = 150 V f = 13.56 MHz SiO2 h1 = 0.78 cm SiO2 h2 = 0.78 cm
6 Grounded V = 150 & 50 V f = 13.56 & 27.12 MHz SiO2 h1 = 0.78 cm SiO2 h2 = 0.78 cm
7 Grounded V = 200 V f = 13.56 MHz Al2O3 h1 = 0.78 cm SiO2 h2 = 0.78 cm
8 Grounded V = 200 V f = 13.56 MHz SiO2 h1 = 0.7 cm SiO2 h2 = 0.7 cm
New Phys.: Sae Mulli 2024;74:401~407 https://doi.org/10.3938/NPSM.74.401
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