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Fig. 2. (Color online) (a) Ion density, (b) absolute value of the y-directional incident ion flux, (c) y-directional incident ion flux normalized by the minimum value, and (d) y-directional incident ion flux normalized by the minimum value within 1 cm near the wafer edge at the wafer surface.
New Phys.: Sae Mulli 2024;74:401~407 https://doi.org/10.3938/NPSM.74.401
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