Fig. 5. (Color online) Two-dimensional profiles of y-directional electric field between x = 0.12 cm and x = 0.18 cm for (a) Case3, (b) Case7, (c) Case1, (d) Case2, and (e) Case8. (f) JexEx normalized to the maximum value at y = 2.14 cm. (g) Difference between electron flux and ion flux incident on the wafer.
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