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Monitoring evaporation process of Isopropyl alcohol using 3D Impedance sensor
New Phys.: Sae Mulli
Published online April 18, 2019;
© 2019 New Physics: Sae Mulli.

Junhee Park*

School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea
Received February 13, 2019; Revised March 14, 2019; Accepted April 18, 2019.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Impedance analysis is one of the electrochemical methods used to study oxidation-reduction reactions, cell drug reactions, and so forth. In this study, we fabricated a sensor that can measure the impedance change inside the solution by measuring the impedance, three dimensionally. Semiconductor and Micro Electro Mechanical System(MEMS) processes were used to fabricate the sensor. To confirm impedance change characteristic of the sensor, we measured the impedance change during isopropyl alcohol volatilization. Electric Cell-substrate Impedance Sensing (ECIS) technique was used to measure the impedance. Finally, the working characteristics of the manufactured sensor was confirmed by measuring the volatilization rate of isopropyl alcohol.
Keywords: Isopropyl alcohol, Sensor, ECIS, Impedance, evaporation

May 2020, 70 (5)
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