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Pattern Synthesis of Designed Graphene by using a LASER Scribing Process
New Phys.: Sae Mulli 2019; 69: 590~595
Published online June 28, 2019;
© 2019 New Physics: Sae Mulli.

Dong Yun LEE1, Jungtae NAM1, Keun Soo KIM2

1Department of Physics, Sejong Univerity, Seoul 05006, Korea
2Department of Physics and Astronomy, Sejong Univerity, Seoul 05006, Korea
Correspondence to:
Received May 2, 2019; Revised May 10, 2019; Accepted May 13, 2019.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

In this study, a LASER scribing process in a vacuum chamber was used to reduce the process time and the energy consumption significantly and pattern synthesis of graphene into the desired shape was carried out. For this purpose, a LASER-assisted

chemical vapor deposition (CVD) was used and a negative tone resist polymer film was coated onto various substrate, such as metal foil, quartz, and quartz coated with a thin metal film, to be used as a solid carbon source for graphene synthesis. On such a prepared substrate, patten synthesis of graphene by LASER ($\lambda=1064$ nm, pulse) local heating method was performed in a vacuum chamber, and each sample was evaluated by Raman spectroscopy to optimize the synthesis conditions. In the case of a metal substrate, the synthesis of patterns of graphene was difficult due to the good thermal conductivity of the metal. For the quartz substrates, the optimized conditions for graphene synthesis were a power of 1.4 W, a scan speed of 1 mm/s, a frequency of 30 kHz, and five exposures. For the quartz substrate coated with a 300 nm Ni film. The optimized conditions were a power of 1.8 W, a scan speed of 2 mm/s, a frequency of 30 kHz and one exposure.

PACS numbers: 68.65.Pq, 78.67.Wj, 81.20.-n, 74.25.nd, 42.62.-b
Keywords: Graphene, LASER scribing, Pattern Synthesis, Raman spectra, Electrodes

May 2020, 70 (5)
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