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Femtosecond-Laser Fabrication of Microfluidic Filters
New Phys.: Sae Mulli 2019; 69: 606~611
Published online June 28, 2019;
© 2019 New Physics: Sae Mulli.

Dae-Young LEE, Ki-Soo LIM*

Department of Physics, Chungbuk National University, Cheongju 28644, Korea
Correspondence to:
Received April 15, 2019; Revised May 7, 2019; Accepted May 8, 2019.
cc This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
We used femtosecond laser pulses to develope two micro-filters with a of T-shape for separating particles with sizes of 10 $\mu$m and 2 $\mu$m, and particles with sizes of 1 $\mu$m and 200 nm sizes. The diameters of the microchannels were controlled by using the laser intensity, scan speed, and scan number. A distributed profile of the particles injected into a channel was observed by using a confocal fluorescence microscope, and the filter function was studied by measuring the fluorescence spectra of the particles transmitted by a fabricated waveguide. We also observed the profile of the inner surface of the channel by using a scanning electron microscope and measured the change in the flow of the water along the channel.
PACS numbers: 81.16.-c, 78.55.-m, 42.70.Ce, 47.61.-k
Keywords: Femtosecond laser, Microchannel, Filter, Fused-silica, Fluorescence

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