Ex) Article Title, Author, Keywords
New Phys.: Sae Mulli 2020; 70: 752-758
Published online September 29, 2020 https://doi.org/10.3938/NPSM.70.752
Copyright © New Physics: Sae Mulli.
Byeongchan PARK1, Nan Ei YU*1, Seong-Jin SON2
1Advanced Photonics Research Institute (APRI), Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea
A high-efficiency grating antenna and a multimode interference beam splitter using a silicon-nitride waveguide have been studied for an optical phased array with an operating wavelength of 1550 nm. A waveguide grating antenna with patterned top cladding and a 1x2 multimode interference beam splitter with a tapered waveguide are considered. The optimized waveguide grating antenna and the multimode interference beam splitter offer above 70% directionality and 98% high single-mode transmission, respectively. These results indicate the possibility of using silicon nitride as a waveguide for a high-efficiency optical phased array.
Keywords: Silicon-nitride waveguide, Optical phased array, Solid-state LiDAR, Integrated optical device, Multimode beam splitter