npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2020; 70: 752-758

Published online September 29, 2020

Copyright © New Physics: Sae Mulli.

High Efficiency Optical Phased Array Using Silicon Nitride Waveguide

Byeongchan PARK1, Nan Ei YU*1, Seong-Jin SON2

1Advanced Photonics Research Institute (APRI), Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea

2Department of Physics and Photon Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea


Received: May 25, 2020; Revised: July 1, 2020; Accepted: July 27, 2020


A high-efficiency grating antenna and a multimode interference beam splitter using a silicon-nitride waveguide have been studied for an optical phased array with an operating wavelength of 1550 nm. A waveguide grating antenna with patterned top cladding and a 1x2 multimode interference beam splitter with a tapered waveguide are considered. The optimized waveguide grating antenna and the multimode interference beam splitter offer above 70% directionality and 98% high single-mode transmission, respectively. These results indicate the possibility of using silicon nitride as a waveguide for a high-efficiency optical phased array.

Keywords: Silicon-nitride waveguide, Optical phased array, Solid-state LiDAR, Integrated optical device, Multimode beam splitter

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