npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041
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Article

Research Paper

New Phys.: Sae Mulli 2021; 71: 1-5

Published online January 29, 2021 https://doi.org/10.3938/NPSM.71.1

Copyright © New Physics: Sae Mulli.

Structural Evolution of Nitrogen-doped Titanium-dioxide Thin Films

Seaung-jae LEE, Ji-won JANG, Hye-won SEO*

Department of Physics, Jeju National University, Jeju 63243, Korea

Correspondence to:hwseo@jejunu.ac.kr

Received: September 22, 2020; Revised: November 5, 2020; Accepted: December 4, 2020

Abstract

We have grown nitrogen-doped titanium dioxide thin films by using DC magnetron sputtering methods. During the growth, the nitrogen flow was altered to adjust the amount of nitrogen into the titanium-dioxide films. By a comparative study of X-ray diffraction and Raman spectroscopy results, we found that the insertion of nitrogen led to a reduction in crystal size/volume, distortion of Ti-O bending, and displacement of Ti atoms. As the nitrogen flow was increased, the degradation of crystal quality became more severe. A blue shift of the optical energy bandgap was observed for the titanium-dioxide films with nitrogen, which is possibly related to quantum-confinement effects.

Keywords: Titanium dioxide, Nitrogen doping, Raman Spectroscopy

Figures

Fig. 1. Raman spectra of samples deposited according to nitrogen flow change.

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