A capacitor consists of two conductors separated by vacuum or an insulator. The capacitance depends on the size, shape, and separation of the conductors and on the material separating them. In order to obtain a high dielectric capacacitor for application to micro electronics, be fabricated Al₂O₃ ?lms by using an anodic- aluminum oxide nano-template method. The surface was examined by using ?eld-emission scanning microscopy FESEM, which show that aluminium were oxidized to form a honeycomb-shaped Aluminium-oxide nano tube. The surface morphology, which was analyzed by SEM show that the ?lm surface had uniform holes 250 nm wide and 200 nm deep. By aluminium sputtering on this surface, we made an anodic capacitor ?lm, and the withstanding voltage and capacitance of this ?lm were 52 V and 0.2 ? F/Cm² , respectively. The Al₂O₃ ?lms made by using the anodic aluminum oxide nano-template method show good dielectric characteristics, that could be using various capacitor applications.