npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Physics: Sae Mulli 2015; 65: 524-530

Published online June 30, 2015

Copyright © New Physics: Sae Mulli.

Study of the Growth Condition for a Columnar Structure when Using Glancing Angle Deposition

기울어진 각도 증착으로 만든 막대형 구조물 성장 조건

Jikeun SEO*1, S. H. KIM2

1 Department of Ophthalmic Optics, Chodang University, Muan 534-701, Korea
2 Department of Ophthalmic Optics, Kwangju Health College, Gwangju 506-701, Korea


Received: February 4, 2015; Revised: May 11, 2015; Accepted: May 12, 2015

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


The growth characteristics of glancing angle deposition (GLAD) are studied by using kinetic Monte Carlo (KMC) simulations in conjunction with molecular dynamics (MD) analyses of the deposited atoms to account for the steering effect. Columnar structures can be reproduced through simulations based on the restricted downward funneling (RDF) model wherein deposited atoms can be trapped on overhang positions. However, the appearance of a columnar structure is not connected with the size of the downward funneling diffusion barrier of the overhang atom. The columnar structures grown by using GLAD can easily be produced under the deposition conditions of restricted diffusion, such as a low temperature or a low speed of the deposited atom. We also confirmed that the GLAD of a material system with a high Schwoebel barrier or a high corner-rounding diffusion barrier led to columnar structures.

Keywords: GLAD, Columnar structure, KMC simulation

기울어진 각도증착 (GLAD)에 의한 성장 형태를 증착원자의 궤적을 계산하는 분자동역학 (MD) 프로그램을 결합한 운동학적 몬테카를로 (KMC) 시뮬레이션을 통하여 고찰하였다. 제한된 하강확산 (RDF) 모형과 같이 증착원자의 매달린 (overhang) 상태를 허용하는 모형만이 막대형 구조물 형성이 가능함을 시뮬레이션 계산으로 확인하였다. 그러나 막대형 구조물의 형성은 매달린 증착 원자의 하강 확산장벽의 크기와는 무관함을 보았다. GLAD에 의한 막대형 구조물은 낮은 온도 또는 낮은 증착원자 속력과 같은 확산이 제한된 증착 조건에서 쉽게 형성되었다. 또한 높은 슈봐벨 장벽 값이나 높은 모서리 장벽 값을 가진 물질계의 GLAD 증착이 막대형 성장을 잘 만드는 것을 확인하였다.

Keywords: GLAD, 막대형 성장, KMC 시뮬레이션

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