npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2019; 69: 41-45

Published online January 31, 2019

Copyright © New Physics: Sae Mulli.

Growth of ZnO Nanostructure Arrays by Using the Hydrothermal Method

Hong Yeol PARK1, Heesang AHN2, Kyujung KIM3, Yoon-Hwae HWANG*4

1 Department of Nanofusion Technology and BK 21 PLUS Nanoconvergence Technology Division, Pusan National University, Miryang 50463, Korea
2 Department of Cogno-Mechatronics Engineering, Pusan National University, Busan 46241, Korea
3 Department of Optics and Mechatronics Engineering, Pusan National University, Busan 46241, Korea
4 Department of Nanoenergy Engineering, Pusan National University, Busan 46241, Korea


Received: October 31, 2018; Revised: November 9, 2018; Accepted: November 12, 2018

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


We studied the hydrothermal growth condition of ZnO nanostructure arrays on p-GaN substrates that could be used as light-emitting diode (LED) pixel arrays for bioimage sensors. The ZnO nanostructures were grown in the forms of either nanorods or nanoflowers at different substrate temperatures during the ZnO seed-layer deposition. We found that flower-shaped ZnO nanostructures and ZnO nanorods were grown when a rough seed layer and a smooth seed-layer were formed at temperatures lower and higher than 500 $^\circ$C, respectively. With low seed-layer growth temperatures, a rough surface was formed, provided numerous nucleation sites in patterned holes, and produced dense flower-shaped nanostructures. On the other hands, with high seed-layer growth temperatures, a smooth seed-layer surface was formed and provided nucleation sites for ZnO nanorod growth.

Keywords: GaN/ZnO, Nanorod, Nanoflower, Hydrothermal


Fig. 1. The SEM image of patterned ZnO nanorods grown in holes with different diameters from 300 nm to 1 μm.

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