Ex) Article Title, Author, Keywords
New Phys.: Sae Mulli 2019; 69: 124-127
Published online February 28, 2019 https://doi.org/10.3938/NPSM.69.124
Copyright © New Physics: Sae Mulli.
Hyeok Jee1, Jin-Soo Kim1, Hye-Won SEO*2
1 Department of Physics, Jeju National University, Jeju 63243, Korea
2 Department of Physics, Jeju National University, Jeju 63243, Korea and Jeju National University Research Institute for Basic Science, Jeju 63243, Korea
This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0/) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
We grow anatase-TiO$_2$ thin films in the low-temperature range from room temperature (RT) to 300 $^\circ$C by using a reactive DC magnetron sputtering method. In particular, we focused on the dependences of the crystalline properties of TiO$_2$ thin films on the growth temperature. The crystallite size and population were found to increase with increasing temperature, which was revealed by using X-ray diffraction and Raman spectroscopic methods. Using a comparative study based on atomic force microscopy, we also identified that the crystallites in the TiO$_2$ thin films were of high quality.
Keywords: TiO$_2$, Crystallites, Growth temperature, Thin films