npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2019; 69: 568-572

Published online May 31, 2019

Copyright © New Physics: Sae Mulli.

Influence of the Energy Density in SrTiO$_3$ Homoepitaxial Thin Films Fabricated on SrTiO$_3$ (001) Substrates by using Pulsed Laser Deposition

Hien-Hoang VAN1, Heon-Jung KIM*1

Department of Physics, Daegu University, Daegu 38911, Korea


Received: December 1, 2018; Revised: March 6, 2019; Accepted: March 8, 2019

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


In this study, homoepitaxial SrTiO$_3$ thin films were deposited on SrTiO$_3$ (001) substrates with different energy density at very low oxygen partial pressure by using a pulsed laser deposition (PLD) method. We carried out X-ray diffraction (XRD), atomic force microscopy (AFM), and resistivity measurements to understand the crystallinity, morphology and electrical properties of these epitaxial films. All films showed homogeneous and uniform morphologies with small root mean square (RMS) roughnesses. The films also exhibited metallic behaviors at temperatures from 2 K to 300 K, indicating that our homoepitaxial SrTiO$_3$ thin films were doped because of nonstoichiometric cations or oxygen deficiencies.

Keywords: Titanate, Homoepitaxy, Roughness, Pulsed laser deposition

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