Use of a 3D Impedance Sensor to Monitor the Evaporation Process of Isopropyl Alcohol

Junhee PARK; Taekyun YOO; Jiseung LEE; ChanHeum PARK; Jaehyun KO; Moongyu JANG

doi:10.3938/NPSM.69.578

Article

Research Paper

New Phys.: Sae Mulli 2019; 69: 578-583

Published online May 31, 2019 https://doi.org/10.3938/NPSM.69.578

Use of a 3D Impedance Sensor to Monitor the Evaporation Process of Isopropyl Alcohol

3차원 임피던스 센서를 이용한 용액 증발 과정 모니터링

Junhee PARK¹, Taekyun YOO¹, Jiseung LEE², ChanHeum PARK², Jaehyun KO³, Moongyu JANG³

¹School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea

²Nano-Bio Regenerative Medical Institute. School of Medicine, Hallym University, Chuncheon 24252, Korea

³School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea/ Nano Convergence Technology Research Institute, Hallym University, Chuncheon 24252, Korea

Correspondence to:jangmg@hallym.ac.kr

Received: February 13, 2019; Revised: March 14, 2019; Accepted: April 18, 2019

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0/) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

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Abstract

A impedance analysis is one of the electrochemical methods used to study oxidation-reduction reactions, cell drug reactions, and so forth. In this study, we fabricated a sensor that can measure the impedance change inside a solution by measuring its impedance three dimensionally. Semiconductor and micro electro mechanical system (MEMS) processes were used to fabricate the sensor. To confirm the impedance-change characteristic of the sensor, we measured the impedance change during the volatilization of isopropyl alcohol. Electric-cell-substrate impedance sensing (ECIS) technique was used to measure the impedance. Finally, the working characteristics of the manufactured sensor were confirmed by measuring the volatilization rate of isopropyl alcohol.

Keywords: Isopropyl alcohol, Sensor, ECIS, Impedance, Evaporation

임피던스 분석은 산화 환원 반응, 세포 약물 반응 등을 연구하는 데 사용되는 전기 화학적 방법 중 하나이다. 본 연구에서는 용액 내부의 임피던스 변화를 3차원적으로 측정 할 수 있는 센서를 제작하였다. 센서는 반도체 및 MEMS (Micro Electro Mechanical System) 공정과 3D 프린터를 사용하여 제작하였으며, 센서의 특성을 확인하기 위해 이소프로필 알코올 증발 과정의 임피던스 변화를 3차원적으로 측정하였다. 실험은 전기적 셀-기판 임피던스 측정법(Electric Cell-substrate Impedance Sensing)을 기반으로 하여 이소프로필 알코올의 증발과정에서 임피던스 변화를 분석하였다. 그 결과 이소프로필 알코올의 증발 속도를 확인하여 센서의 기초적 특성을 확인하였고 센서의 신뢰성이 확립되었다.

Keywords: 이소프로필 알코올, 임피던스 센서, 증발, 3D 프린팅, MEMS