npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2019; 69: 578-583

Published online May 31, 2019

Copyright © New Physics: Sae Mulli.

Use of a 3D Impedance Sensor to Monitor the Evaporation Process of Isopropyl Alcohol

3차원 임피던스 센서를 이용한 용액 증발 과정 모니터링

Junhee PARK1, Taekyun YOO1, Jiseung LEE2, ChanHeum PARK2, Jaehyun KO3, Moongyu JANG3

1School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea

2Nano-Bio Regenerative Medical Institute. School of Medicine, Hallym University, Chuncheon 24252, Korea
3School of Nano Convergence Technology, Hallym University, Chuncheon 24252, Korea/ Nano Convergence Technology Research Institute, Hallym University, Chuncheon 24252, Korea 


Received: February 13, 2019; Revised: March 14, 2019; Accepted: April 18, 2019

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


A impedance analysis is one of the electrochemical methods used to study oxidation-reduction reactions, cell drug reactions, and so forth. In this study, we fabricated a sensor that can measure the impedance change inside a solution by measuring its impedance three dimensionally. Semiconductor and micro electro mechanical system (MEMS) processes were used to fabricate the sensor. To confirm the impedance-change characteristic of the sensor, we measured the impedance change during the volatilization of isopropyl alcohol. Electric-cell-substrate impedance sensing (ECIS) technique was used to measure the impedance. Finally, the working characteristics of the manufactured sensor were confirmed by measuring the volatilization rate of isopropyl alcohol.

Keywords: Isopropyl alcohol, Sensor, ECIS, Impedance, Evaporation

임피던스 분석은 산화 환원 반응, 세포 약물 반응 등을 연구하는 데 사용되는 전기 화학적 방법 중 하나이다. 본 연구에서는 용액 내부의 임피던스 변화를 3차원적으로 측정 할 수 있는 센서를 제작하였다. 센서는 반도체 및 MEMS (Micro Electro Mechanical System) 공정과 3D 프린터를 사용하여 제작하였으며, 센서의 특성을 확인하기 위해 이소프로필 알코올 증발 과정의 임피던스 변화를 3차원적으로 측정하였다. 실험은 전기적 셀-기판 임피던스 측정법(Electric Cell-substrate Impedance Sensing)을 기반으로 하여 이소프로필 알코올의 증발과정에서 임피던스 변화를 분석하였다. 그 결과 이소프로필 알코올의 증발 속도를 확인하여 센서의 기초적 특성을 확인하였고 센서의 신뢰성이 확립되었다.

Keywords: 이소프로필 알코올, 임피던스 센서, 증발, 3D 프린팅, MEMS

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