npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2020; 70: 12-18

Published online January 31, 2020

Copyright © New Physics: Sae Mulli.

Electrical Characterization of Printed ITO Films Fabricated on Biodegradable Plastic Substrate

생분해성 플라스틱 기판상에 제작한 ITO 인쇄박막의 전기적 특성 분석

Dongwan KO1, Junseck CHOI1, Joonyoung SEO1, Jaeha NOH1, Jiho CHANG1*, Sangtae LEE2, Jung-Yeul Jung3,Moonjin LEE3

1Major of Electronic Materials Engineering, Korea Maritime and Ocean University, Busan 49112, Korea

2Department of Offshore Plant Management, Korea Maritime and Ocean University, Busan 49112, Korea
3Maritime Safety and Environmental Research Division, Korea Research Institute of Ships and Ocean engineering, Daejeon 34103, Korea


Received: October 5, 2019; Revised: November 14, 2019; Accepted: November 18, 2019

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


For fabricating hazardous and noxious substance (HNS) sensors based on biodegradable plastics, we printed indium-tin-oxide (ITO) films and analyzed their electrical and structural properties. Differential scanning calorimetry (DSC) was used to determine the heat treatment temperature by investigating the glass transition temperature of the poly lactic acid (PLA) substrate. Also, the films were fabricated by introducing a film-surface treatment process. The structural and the electrical properties of the fabricated film were compared with those for sputtered ITO films by using X-ray diffraction (XRD) and Hall effect measurements. The grain size of the printed ITO (P-ITO) was calculated to be 37.4 nm, the carrier concentration was 4.35 $\times$ 10$ ^{18}$ cm$ ^{-3}$ and the mobility was 1.43 cm$ ^{2}$/Vs at 300 K. The conductivity of the ITO film was limited by grain boundary scattering, and the resistivity of the ITO film varied due to thermal excitation of carriers trapped at the grain boundary.

Keywords: HNS sensor, PLA, Printed ITO film, Conduction characteristics

생분해성 플라스틱 기반의 위험유해물질(hazardous and noxious substance, HNS) 센서 제작을 목표로 인듐 주석 산화물(Indium Tin Oxide, ITO) 인쇄박막을 제작하고 박막의 구조적, 전기적 특성을 분석하였다. Differential scanning calorimetry (DSC)법으로 poly lactic acid (PLA) 기판의 유리전이 온도를 조사하여 열처리 온도를 결정하였으며, 박막 제작 조건을 조사하고 표면 처리 공정을 도입하여 박막을 제작하였다. 제작한 박막의 물성은 상용 (Sputtered) ITO 박막과 비교 검토하였다. XRD 측정 결과를 이용하여 ITO 인쇄박막의 결정립 크기는 37.4 nm 로 파악되었으며, 홀 효과 측정 결과 300 K에서 캐리어 농도는 4.35 $\times$ 10$ ^{18}$ cm$ ^{-3}$, 이동도는 1.43 cm$ ^{2}$/Vs로 측정되었다. 또한 온도 변화 홀 효과 측정 결과로부터 인쇄한 ITO 박막은 결정립 경계 산란에 의해서 이동도가 제한되며 결정립경계의 대전 정도에 따라 박막의 비저항이 제한 받는 것을 알 수 있었다.

Keywords: HNS센서, PLA, ITO 인쇄박막, 전도특성

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