npsm 새물리 New Physics : Sae Mulli

pISSN 0374-4914 eISSN 2289-0041


Research Paper

New Phys.: Sae Mulli 2020; 70: 510-514

Published online May 29, 2020

Copyright © New Physics: Sae Mulli.

Vacuum Feedthrough for a UV Region Cathodoluminescence Experiment with an Optical Fiber

자외선 영역 음극선루미네선스 실험을 위한 광섬유 적용 진공 피드스루

Sang-Min PARK1, Sayong HONG1*, Jae-Uk JEONG2

1Department of Physics, Kongju National University, Gongju 32588, Korea

2Korea Environment Corporation, Korea Environment Corporation, Incheon 22689, Korea


Received: February 20, 2020; Revised: March 13, 2020; Accepted: March 13, 2020

This is an open-access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.


A feedthrough with an optical fiber was presented to measure the cathodoluminescence from a sample in a scanning electron microscopes vacuum chamber. The optical system(lenses and the optical fiber) was made of fused silica to enable cathodoluminescence ultraviolet-visible-infrared(190 nm to 1250 nm) spectral measurements. The fabricated feedthrough confirmed the peaks of an energy band transition at 350 nm for GaN and 260 nm for AlGaN. Also, the absorption current and the cathodoluminescence intensity in the measured sample increased linearly with the acceleration voltage of the electron beam.

Keywords: Feedthrough, Cathodoluminescence, Luminescence, Spectrometer, SEM

주사전자현미경 진공 챔버 내의 시료로 부터 음극선루미네선스를 측정하기 위해 광섬유를 적용하여 피드스루(feedthrough)를 제시하였다. 음극선루미네선스의 원자외선-가시광선-적외선(190 nm ~ 1250 nm) 스펙트럼 측정이 가능하도록 석영유리 재질의 렌즈와 광섬유 광학계를 구성하였다. 제작된 피드스루로 GaN의 350 nm, AlGaN의 260 nm에 대해 각 에너지 밴드 전이 피크를 확인하였다. 그리고 측정 시료 내의 흡수 전류와 음극선루미네선스의 세기는 전자빔의 가속 전압에 따라 선형적으로 증가하였다.

Keywords: 피드스루, 음극선루미네선스, 루미네선스, 스펙트로메타, 주사전자현미경

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